Microfabrication
Microfabrication is a crucial technology for creating miniaturized devices and structures with high precision. In our lab, we have three different techniques for fabricating micro-scale surface textures and micro-channels, including: (1) Photolithography; (2) 3D printing; and (3) Laser texturing.
Photolithography
Minimum feature size 2 um. Maximum sample size 4 by 4 inch (100 by 100 mm). The system includes:
– A complete system for SU8 mold fabrication, including spin coater, hot plate, UV lamp.
– A complete system for PDMS chip fabrication, including vacuum, oven, plasma bonding.
– Microfluidic pressure-driven flow controller (#OB1 by Elveflow)
Learn more about our photolithography system here.
3D printing
Elegoo Saturn 3 Ultra (Minimum feature size ~20 um, maximum sample size 218.88 × 122.88 × 220 mm )
Elegoo Mars 5 Ultra (Minimum feature size ~18 um, maximum sample size 153.36 x 77.76 x 165 mm)